Shutdown svgcoat SNF 2011-01-03 14:44:40: Computer Problems

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Jan 7 13:55:26 PST 2011


Re-installed Recipe Manager computer. Verified system operation- All OK. Qualified 3612, 220-7 and 220-3 resists. Data to follow. Created new recipes for 220-3 resist for 3.0 and 4.0 micron thickness




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