Comment svgcoat SNF 2011-01-07 14:52:06: Thickness results 1/7

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Jan 7 14:52:07 PST 2011


3612 Resist-
1.0 Micron Target: 10029 A Mean, 21 A Std Dev
1.6 Micron Target: 16637 A Mean, 5 A Std Dev
 220-7 Resist-
 7.0 Micron Target: 71687 A Mean, 20 A Std Dev
 220-3 Resist-
 3.0 Micron Target: 29962 A Mean, 35 A Std Dev  (Spin Spd: 2500RPM)
 4.0 Micron Target: 40261 A Mean, 51 A Std Dev (Spin Spd: 1400RPM)




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