Shutdown svgcoat SNF 2011-01-07 16:20:28: Track Down

[gsosa at snf.stanford.edu]

We decide to leave the track down over the weekend so that on Monday, we can spend some additional time setting up the track and doing some additional testing. The 220-3 coatings are showing an artifact pattern that may be related to exhaust. Adjusting for 220-3 may impact  220-7 and 3612 resists.  We do not want to risk users having problems over the weekend. Sorry for the inconvenience.  The Litho Team