Shutdown svgcoat SNF 2011-01-08 20:42:49: Return to shutdown ...

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Jan 10 15:50:37 PST 2011


Re-adjusted main duct exhaust which feeds both tracks to 1000 FPM. Re-adjusted track exhaust on both tracks locally with butterfly valve. Adjusted each track to 700 FPM. Purged 3612 resist and ran test wafers. 3612 1.0 and 1.6 micron looks good. 220-3 and 220-7 still need more work. Will continue tomorrow.
 -3612 test results-
   1.6um Target: Mean: 16568 A, Std Dev: 55 A
   1.0um Target- Mean: 10063 A, Std Dev 18 A
  Track released for 3612 resist processing only




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