Problem svgcoat SNF 2011-01-17 10:54:17: hot plate carriage doesn't move

fpurkl at snf.stanford.edu fpurkl at snf.stanford.edu
Mon Jan 17 10:54:18 PST 2011

Previous message: Comment svgcoat SNF 2011-01-13 15:49:37: 220-7 Update 1/13
Next message: Problem svgcoat SNF 2011-01-17 10:54:17: hot plate carriage doesn't move
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

hot plate carriage doesn't move out of the way to let wafer onto the hotplate. Slight push helps it to move.
error message on PC: HPO/VP CARRIAGE OUT?

Previous message: Comment svgcoat SNF 2011-01-13 15:49:37: 220-7 Update 1/13
Next message: Problem svgcoat SNF 2011-01-17 10:54:17: hot plate carriage doesn't move
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the svgcoat-pcs mailing list