Problem svgcoat SNF 2011-01-17 10:54:17: hot plate carriage doesn't move

fpurkl at snf.stanford.edu fpurkl at snf.stanford.edu
Mon Jan 17 10:54:18 PST 2011


hot plate carriage doesn't move out of the way to let wafer onto the hotplate. Slight push helps it to move.
error message on PC: HPO/VP CARRIAGE OUT?  




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