Problem svgcoat SNF 2011-01-19 11:34:45: 220-7 is not that uniform

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Wed Jan 19 11:34:47 PST 2011


is good for non critical layers
I have asked Gary to drop the dispense rate a little to see what impact that will have on the spin uniformity.




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