Problem svgcoat SNF 2011-01-26 12:21:26: Hot Plate Temperature high

jasonlin at snf.stanford.edu jasonlin at snf.stanford.edu
Wed Jan 26 12:21:26 PST 2011

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It started out at 90, but halfway through coating my wafers, it went to about 120 and alarmed.  After resetting track, it seems to be back to 90 degrees now.

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