Problem svgcoat SNF 2011-01-26 12:21:26: Hot Plate Temperature high

jasonlin at snf.stanford.edu jasonlin at snf.stanford.edu
Wed Jan 26 12:21:26 PST 2011


It started out at 90, but halfway through coating my wafers, it went to about 120 and alarmed.  After resetting track, it seems to be back to 90 degrees now.




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