Comment svgcoat SNF 2011-01-28 19:44:08:

jasmine at snf.stanford.edu jasmine at snf.stanford.edu
Fri Jan 28 19:44:08 PST 2011


The 7um coating is awful. The series of coatings change from wafer to wafer. Some wafers can look average while some are atrocious with streaks all over the wafer. It also looks like there are bubbles on the coated wafer. This program needs to be looked at thoroughly and be consistant.  
This  step is critical for me as my next step is DRIE and require my large devices to be protected. 




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