From vilanova at snf.stanford.edu Fri Jul 1 08:46:26 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 1 Jul 2011 08:46:26 -0700 Subject: Comment svgcoat SNF 2011-07-01 08:46:25: cleaned Catch cup belts hotplate .... Message-ID: Cleaned catch cup dummy wafers belts hotplate and chill plate, tested Ok , ready to use. From ehsans at snf.stanford.edu Thu Jul 7 16:37:38 2011 From: ehsans at snf.stanford.edu (ehsans at snf.stanford.edu) Date: Thu, 7 Jul 2011 16:37:38 -0700 Subject: Problem svgcoat SNF 2011-07-07 16:37:38: Computer screen for this track is frozen Message-ID: I was not able to process any wafers because the computer screen was frozen. From gsosa at snf.stanford.edu Fri Jul 8 09:24:21 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 8 Jul 2011 09:24:21 -0700 Subject: Problem svgcoat SNF 2011-07-07 16:37:38: Computer screen for this track is frozen Message-ID: Checked compter. Recipe manager working OK. Possibly reset by another user. From vilanova at snf.stanford.edu Thu Jul 14 08:42:39 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 14 Jul 2011 08:42:39 -0700 Subject: Comment svgcoat SNF 2011-07-14 08:42:38: cleaned up Dummys chuck belts hotplates chill plates Message-ID: Cleaned Dummy wafers, Chuck Catch cup Belts hotplates chill plates, From fpurkl at snf.stanford.edu Fri Jul 15 11:21:58 2011 From: fpurkl at snf.stanford.edu (fpurkl at snf.stanford.edu) Date: Fri, 15 Jul 2011 11:21:58 -0700 Subject: Problem svgcoat SNF 2011-07-15 11:21:58: speedboats Message-ID: after running 5 dummy wafers there are still big speedboats all around the periphery of the wafer From fpurkl at snf.stanford.edu Fri Jul 15 11:25:01 2011 From: fpurkl at snf.stanford.edu (fpurkl at snf.stanford.edu) Date: Fri, 15 Jul 2011 11:25:01 -0700 Subject: Comment svgcoat SNF 2011-07-15 11:25:01: earlier Problem: 1.6um 3612 Message-ID: In my earlier Problem report concerning the speedboats I forgot to include: I was running 3612 w/o VP 1.6 um From mahnaz at snf.stanford.edu Fri Jul 15 11:37:37 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 15 Jul 2011 11:37:37 -0700 Subject: Problem svgcoat SNF 2011-07-15 11:37:37: 7 um suck back is not good Message-ID: From vilanova at snf.stanford.edu Fri Jul 15 14:09:15 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 15 Jul 2011 14:09:15 -0700 Subject: Problem svgcoat SNF 2011-07-15 11:21:58: speedboats Message-ID: Purged Line and adjusted dispense hose, wafer uniformity looks good cycled wafers Ok to use From vilanova at snf.stanford.edu Fri Jul 15 14:09:20 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 15 Jul 2011 14:09:20 -0700 Subject: Comment svgcoat SNF 2011-07-15 11:25:01: earlier Problem: 1.6um 3612 Message-ID: Purged Line and adjusted dispense hose, wafer uniformity looks good cycled wafers Ok to use From vilanova at snf.stanford.edu Fri Jul 15 14:12:46 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 15 Jul 2011 14:12:46 -0700 Subject: Problem svgcoat SNF 2011-07-15 11:37:37: 7 um suck back is not good Message-ID: Adjusted suck back and cleaned dispense hose, also I cleaned up the hotplate ( it had A Ring of resist On it ) Cycled wafers Uniformity Looks Good all the way Around ok to use. From vilanova at snf.stanford.edu Fri Jul 22 14:17:42 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 22 Jul 2011 14:17:42 -0700 Subject: Comment svgcoat SNF 2011-07-22 14:17:42: 220-7 Uniformity and Thickness Results Message-ID: Thickness: Top 75593 Angstroms Bottom 75712 Center 75239 Right 75825 Left 75781 Angstroms Uniformity Looks Beautiful!!!!! From mahnaz at snf.stanford.edu Mon Jul 25 14:14:15 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 25 Jul 2011 14:14:15 -0700 Subject: Problem svgcoat SNF 2011-07-25 14:14:14: 220-7 suck back Message-ID: needs be pulled back slightly up. From vilanova at snf.stanford.edu Mon Jul 25 14:25:55 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 25 Jul 2011 14:25:55 -0700 Subject: Problem svgcoat SNF 2011-07-25 14:14:14: 220-7 suck back Message-ID: cleaned dispense hose and cycled wafers , Uniformity still looks Good and suck back is Good aswell, Ok to use. From zpatel at snf.stanford.edu Wed Jul 27 15:58:00 2011 From: zpatel at snf.stanford.edu (zpatel at snf.stanford.edu) Date: Wed, 27 Jul 2011 15:58:00 -0700 Subject: Problem svgcoat SNF 2011-07-27 15:58:00: SPR220-7um resist Message-ID: SPR220-7um resist gives streaks on wafers can see trapped bubbles in resist delivery lines. Ran 4 dummy wafer was not much help Recipe used 4: 7um 200sec bake backsideEBR From ehe at snf.stanford.edu Wed Jul 27 17:29:28 2011 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Wed, 27 Jul 2011 17:29:28 -0700 Subject: Problem svgcoat SNF 2011-07-27 17:29:28: hotplate really dirty Message-ID: covered with pink gum (resist I guess) and really hard to remove with a swab From vilanova at snf.stanford.edu Thu Jul 28 07:58:01 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 28 Jul 2011 07:58:01 -0700 Subject: Shutdown svgcoat SNF 2011-07-28 07:58:00: Under maintenance..... Message-ID: From vilanova at snf.stanford.edu Thu Jul 28 08:47:10 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 28 Jul 2011 08:47:10 -0700 Subject: Shutdown svgcoat SNF 2011-07-28 07:58:00: Under maintenance..... Message-ID: Found Photoresist residues On the panel Next to the controllers also on the table where the Computers are, Cleaned all Up, Cleaned Resist Residues From Hotplate, Dummy wafers , Replaced Dirty Catch cup cleaned Dispense NOzzle , cleaned Chuck and ran A couple Of Thick Resist Recipes , Wafers Uniformity Looks Good, Ready to use. TO THE THICK RESIST USERS: "CLEAN AFTER YOURSELF, CLEAN THE HOTPLATE SO THE NEXT USER WILL NOT HAVE ISSUES WITH THE BACKSIDE OF THEIR WAFERS. From vilanova at snf.stanford.edu Thu Jul 28 08:47:17 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 28 Jul 2011 08:47:17 -0700 Subject: Problem svgcoat SNF 2011-07-27 15:58:00: SPR220-7um resist Message-ID: Found Photoresist residues On the panel Next to the controllers also on the table where the Computers are, Cleaned all Up, Cleaned Resist Residues From Hotplate, Dummy wafers , Replaced Dirty Catch cup cleaned Dispense NOzzle , cleaned Chuck and ran A couple Of Thick Resist Recipes , Wafers Uniformity Looks Good, Ready to use. TO THE THICK RESIST USERS: "CLEAN AFTER YOURSELF, CLEAN THE HOTPLATE SO THE NEXT USER WILL NOT HAVE ISSUES WITH THE BACKSIDE OF THEIR WAFERS. From vilanova at snf.stanford.edu Thu Jul 28 08:47:23 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 28 Jul 2011 08:47:23 -0700 Subject: Problem svgcoat SNF 2011-07-27 17:29:28: hotplate really dirty Message-ID: Found Photoresist residues On the panel Next to the controllers also on the table where the Computers are, Cleaned all Up, Cleaned Resist Residues From Hotplate, Dummy wafers , Replaced Dirty Catch cup cleaned Dispense NOzzle , cleaned Chuck and ran A couple Of Thick Resist Recipes , Wafers Uniformity Looks Good, Ready to use. TO THE THICK RESIST USERS: "CLEAN AFTER YOURSELF, CLEAN THE HOTPLATE SO THE NEXT USER WILL NOT HAVE ISSUES WITH THE BACKSIDE OF THEIR WAFERS.