Problem svgcoat SNF 2011-07-15 11:21:58: speedboats

fpurkl at snf.stanford.edu fpurkl at snf.stanford.edu
Fri Jul 15 11:21:58 PDT 2011

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after running 5 dummy wafers there are still big speedboats all around the periphery of the wafer

Previous message: Comment svgcoat SNF 2011-07-14 08:42:38: cleaned up Dummys chuck belts hotplates chill plates
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