Comment svgcoat SNF 2011-07-15 11:25:01: earlier Problem: 1.6um 3612
vilanova at snf.stanford.edu
vilanova at snf.stanford.edu
Fri Jul 15 14:09:20 PDT 2011
Purged Line and adjusted dispense hose,
wafer uniformity looks good
cycled wafers
Ok to use
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