Problem svgcoat SNF 2011-07-15 11:37:37: 7 um suck back is not good

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Fri Jul 15 14:12:46 PDT 2011

Previous message: Problem svgcoat SNF 2011-07-15 11:37:37: 7 um suck back is not good
Next message: Comment svgcoat SNF 2011-07-22 14:17:42: 220-7 Uniformity and Thickness Results
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Adjusted suck back and cleaned dispense hose, also I cleaned up the hotplate ( it had  A Ring of resist On it  )
Cycled wafers Uniformity Looks Good all the way Around
ok to use.

Previous message: Problem svgcoat SNF 2011-07-15 11:37:37: 7 um suck back is not good
Next message: Comment svgcoat SNF 2011-07-22 14:17:42: 220-7 Uniformity and Thickness Results
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the svgcoat-pcs mailing list