Problem svgcoat SNF 2011-07-27 15:58:00: SPR220-7um resist

[zpatel at snf.stanford.edu]

SPR220-7um resist gives  streaks on wafers
can see trapped bubbles in resist delivery lines.
Ran 4 dummy wafer was not much help 
Recipe used 4: 7um 200sec bake backsideEBR