Problem svgcoat SNF 2011-07-27 15:58:00: SPR220-7um resist

zpatel at snf.stanford.edu zpatel at snf.stanford.edu
Wed Jul 27 15:58:00 PDT 2011


SPR220-7um resist gives  streaks on wafers
can see trapped bubbles in resist delivery lines.
Ran 4 dummy wafer was not much help 
Recipe used 4: 7um 200sec bake backsideEBR




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