Problem svgcoat SNF 2011-07-27 15:58:00: SPR220-7um resist

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu Jul 28 08:47:17 PDT 2011


Found Photoresist residues On the panel Next to the controllers also
on the table where the Computers are, Cleaned all Up, Cleaned 
Resist Residues From Hotplate, Dummy wafers , Replaced Dirty Catch cup cleaned Dispense NOzzle , cleaned Chuck and ran   A couple Of 
Thick Resist Recipes , Wafers Uniformity Looks Good, Ready to use.
TO THE THICK RESIST USERS:
"CLEAN AFTER YOURSELF, CLEAN THE HOTPLATE SO THE
NEXT USER WILL NOT HAVE ISSUES WITH THE BACKSIDE OF 
THEIR WAFERS. 




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