From hongyuc at snf.stanford.edu Sun Jun 5 21:24:27 2011 From: hongyuc at snf.stanford.edu (hongyuc at snf.stanford.edu) Date: Sun, 5 Jun 2011 21:24:27 -0700 Subject: Problem svgcoat SNF 2011-06-05 21:24:26: the hot plate is very dirty Message-ID: Found one very dirty dummy in the receving side. the previous user was ran 7um recipe. decided not to use it after enabled the track. From vilanova at snf.stanford.edu Mon Jun 6 08:03:47 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 6 Jun 2011 08:03:47 -0700 Subject: Problem svgcoat SNF 2011-06-05 21:24:26: the hot plate is very dirty Message-ID: cleaned hotplate and belts, ok to use. From vilanova at snf.stanford.edu Fri Jun 10 09:48:47 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 10 Jun 2011 09:48:47 -0700 Subject: Comment svgcoat SNF 2011-06-10 09:48:47: cleaned!!! Message-ID: Cleaned all dummy wafers ,Including the Developer Ones, Cleaned catch cup , hotplates , chill plates ,chuck and belts , Cycled wafers Ok to use. From vilanova at snf.stanford.edu Fri Jun 17 09:18:28 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 17 Jun 2011 09:18:28 -0700 Subject: Comment svgcoat SNF 2011-06-17 09:18:27: Replaced Spinner Carriage Tranfers Belts Message-ID: Replaced Spinner Carriage Tranfers Belts From mlpipes at snf.stanford.edu Mon Jun 20 15:12:58 2011 From: mlpipes at snf.stanford.edu (mlpipes at snf.stanford.edu) Date: Mon, 20 Jun 2011 15:12:58 -0700 Subject: Problem svgcoat SNF 2011-06-20 15:12:58: SPR 7um non-uniform Message-ID: The 7 um resist (SPR-220) is not depositing uniformly on the surface of the wafer. There is a splotch in the center that varies from .5-2cm in diameter. Mario is aware of the problem and is looking into it. From gsosa at snf.stanford.edu Tue Jun 21 15:51:05 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 21 Jun 2011 15:51:05 -0700 Subject: Shutdown svgcoat SNF 2011-06-21 15:51:04: Carriage problem Message-ID: The carriage on coat module is not working. Need to troubleshoot. From vilanova at snf.stanford.edu Wed Jun 22 14:27:19 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 22 Jun 2011 14:27:19 -0700 Subject: Shutdown svgcoat SNF 2011-06-21 15:51:04: Carriage problem Message-ID: Replaced Carriage In/Out Solenoid , Adjusted air pressure and tested Ok to use, Were still working On the 220-7 thick resist Uniformity Issue , We just need to do some Tests . From damodei at snf.stanford.edu Wed Jun 22 17:22:48 2011 From: damodei at snf.stanford.edu (damodei at snf.stanford.edu) Date: Wed, 22 Jun 2011 17:22:48 -0700 Subject: Problem svgcoat SNF 2011-06-22 17:22:47: nozzle out of alignment Message-ID: There is a spot in the center of each wafer that isn't being coated with photoresist. I think the dispense arm is not tracking all the way to the center -- it seems to be missing the center by a small amount. From vilanova at snf.stanford.edu Thu Jun 23 08:20:23 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 23 Jun 2011 08:20:23 -0700 Subject: Problem svgcoat SNF 2011-06-22 17:22:47: nozzle out of alignment Message-ID: Cycled wafers Using all the dfferent recipes and I couldnt repeat the User Problem , It would be helpful next time to let us know which recipe it is, Checked every step On them everything normal, ok to use. From gsosa at snf.stanford.edu Thu Jun 23 09:23:30 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 23 Jun 2011 09:23:30 -0700 Subject: Problem svgcoat SNF 2011-06-20 15:12:58: SPR 7um non-uniform Message-ID: Checked and adjusted nozzle height and centering. Adjusted suckback. Tested out with many wafers. Looks good. From calarrudo at snf.stanford.edu Fri Jun 24 17:44:59 2011 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Fri, 24 Jun 2011 17:44:59 -0700 Subject: Problem svgcoat SNF 2011-06-24 17:44:59: Coater track 1 Message-ID: Streaking wafers badly using prog 7 1.0um wo?VP 2mm EBR. had to rework 5 wafers, The carrier reset for track 1 also broke one of my wafers. From vilanova at snf.stanford.edu Sat Jun 25 10:45:19 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Sat, 25 Jun 2011 10:45:19 -0700 Subject: Problem svgcoat SNF 2011-06-24 17:44:59: Coater track 1 Message-ID: Purged Line and cycled wafers, Uniformity Looks Good and the track arms are Fine, We'll keep an eye on the track arms open/closing Movement. ok to use. From mahnaz at snf.stanford.edu Mon Jun 27 11:08:37 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 27 Jun 2011 11:08:37 -0700 Subject: Problem svgcoat SNF 2011-06-27 11:08:37: 3612 1 um speed boat Message-ID: Ran 4 ummies and cleaned the nozzel with q-tips. all wafers 8 ofthem came out with speed boat and few with EBR back splash. From mahnaz at snf.stanford.edu Mon Jun 27 11:09:12 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 27 Jun 2011 11:09:12 -0700 Subject: Comment svgcoat SNF 2011-06-27 11:09:12: Mario started to work on tha trac already. Message-ID: From vilanova at snf.stanford.edu Mon Jun 27 11:27:09 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 27 Jun 2011 11:27:09 -0700 Subject: Problem svgcoat SNF 2011-06-27 11:08:37: 3612 1 um speed boat Message-ID: Purged line and adjusted suck back, Tested Ok, Ready to use. From zguo at snf.stanford.edu Tue Jun 28 06:50:30 2011 From: zguo at snf.stanford.edu (zguo at snf.stanford.edu) Date: Tue, 28 Jun 2011 06:50:30 -0700 Subject: Problem svgcoat SNF 2011-06-28 06:50:29: track will not send wafer Message-ID: From vilanova at snf.stanford.edu Tue Jun 28 07:05:00 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 28 Jun 2011 07:05:00 -0700 Subject: Problem svgcoat SNF 2011-06-28 06:50:29: track will not send wafer Message-ID: tracks are working Fine now, Cycled wafers ok to use. From hnuhn at snf.stanford.edu Tue Jun 28 12:36:50 2011 From: hnuhn at snf.stanford.edu (hnuhn at snf.stanford.edu) Date: Tue, 28 Jun 2011 12:36:50 -0700 Subject: Problem svgcoat SNF 2011-06-28 12:36:49: Software System hang up Message-ID: Hi there, the software stalled when I tried to check the hotplate settings. it does not response to any input. Thanks, Harald From gsosa at snf.stanford.edu Tue Jun 28 13:46:30 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 28 Jun 2011 13:46:30 -0700 Subject: Problem svgcoat SNF 2011-06-28 12:36:49: Software System hang up Message-ID: Reset the computer. Reset track system. All OK