Comment svgcoat SNF 2011-06-10 09:48:47: cleaned!!!

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Fri Jun 10 09:48:47 PDT 2011


Cleaned all dummy wafers ,Including  the Developer Ones,
Cleaned catch cup , hotplates  , chill plates ,chuck  and belts ,
Cycled wafers Ok to use. 




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