Comment svgcoat SNF 2011-06-10 09:48:47: cleaned!!!
vilanova at snf.stanford.edu
vilanova at snf.stanford.edu
Fri Jun 10 09:48:47 PDT 2011
Cleaned all dummy wafers ,Including the Developer Ones,
Cleaned catch cup , hotplates , chill plates ,chuck and belts ,
Cycled wafers Ok to use.
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