Problem svgcoat SNF 2011-06-20 15:12:58: SPR 7um non-uniform

mlpipes at snf.stanford.edu mlpipes at snf.stanford.edu
Mon Jun 20 15:12:58 PDT 2011


The 7 um resist (SPR-220) is not depositing uniformly on the surface of the wafer.  There is a splotch in the center that varies from .5-2cm in diameter.  Mario is aware of the problem and is looking into it.




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