Problem svgcoat SNF 2011-06-22 17:22:47: nozzle out of alignment

damodei at snf.stanford.edu damodei at snf.stanford.edu
Wed Jun 22 17:22:48 PDT 2011


There is a spot in the center of each wafer that isn't being coated with photoresist.  I think the dispense arm is not tracking all the way to the center -- it seems to be missing the center by a small amount.




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