Problem svgcoat SNF 2011-06-20 15:12:58: SPR 7um non-uniform

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Thu Jun 23 09:23:30 PDT 2011

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Checked and adjusted nozzle height and centering. Adjusted suckback. Tested out with many wafers. Looks good.

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