Problem svgcoat SNF 2011-06-24 17:44:59: Coater track 1
calarrudo at snf.stanford.edu
calarrudo at snf.stanford.edu
Fri Jun 24 17:44:59 PDT 2011
Streaking wafers badly using prog 7 1.0um wo?VP 2mm EBR. had to rework 5 wafers, The carrier reset for track 1 also broke one of my wafers.
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