Problem svgcoat SNF 2011-06-24 17:44:59: Coater track 1

calarrudo at snf.stanford.edu calarrudo at snf.stanford.edu
Fri Jun 24 17:44:59 PDT 2011


Streaking wafers badly using prog 7 1.0um wo?VP 2mm EBR.  had to rework 5 wafers,  The carrier reset for track 1 also broke one of my wafers.




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