From gsosa at snf.stanford.edu Tue Mar 1 15:19:38 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 1 Mar 2011 15:19:38 -0800 Subject: Shutdown svgcoat SNF 2011-03-01 15:19:38: Exhaust problem 3/1 Message-ID: From gsosa at snf.stanford.edu Tue Mar 1 17:26:52 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 1 Mar 2011 17:26:52 -0800 Subject: Shutdown svgcoat SNF 2011-03-01 15:19:38: Exhaust problem 3/1 Message-ID: Solvent exhaust re-adjusted to compensate for reduced flow. Spot checked thickness on 1 micron 3612- All looks ok. Mean: 10060 A Std Dev: 15 A From dton at snf.stanford.edu Tue Mar 1 19:29:50 2011 From: dton at snf.stanford.edu (dton at snf.stanford.edu) Date: Tue, 1 Mar 2011 19:29:50 -0800 Subject: Problem svgcoat SNF 2011-03-01 19:29:49: Hot plate Message-ID: The hot plate had problem when I ran. The metal bar beneath the orange belt moved and block the wafer handling unit from moving down properly. Someone helped me to push it back in place ... but i think the screws holding it should be tighten. thanks, dinh ton From gsosa at snf.stanford.edu Wed Mar 2 10:15:31 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 2 Mar 2011 10:15:31 -0800 Subject: Comment svgcoat SNF 2011-03-02 10:15:30: Track Status 3/2 Message-ID: The solvent exhaust system was repaired by facilities maintenance. Static pressure and flow returned to normal levels. Re-adjusted coater bowl exhaust flow back to normal level. Checked 1.0 micron 3612 coating. All looks good. Front and backside EBR look good. Mean: 10072 A Std Dev: 8 A From gsosa at snf.stanford.edu Wed Mar 2 11:00:20 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 2 Mar 2011 11:00:20 -0800 Subject: Problem svgcoat SNF 2011-03-01 19:29:49: Hot plate Message-ID: Re-attached the metal belt shroud on the carriage and tightened all screws. Tested track operation- All OK. From grahamab at snf.stanford.edu Sun Mar 6 16:32:45 2011 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Sun, 6 Mar 2011 16:32:45 -0800 Subject: Problem svgcoat SNF 2011-03-06 16:32:44: SPR 220 still looks horrible Message-ID: ran several dummies and still not coating well. coverage is bad, uniformity looks awful. From grahamab at snf.stanford.edu Sun Mar 6 17:15:08 2011 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Sun, 6 Mar 2011 17:15:08 -0800 Subject: Comment svgcoat SNF 2011-03-06 17:15:07: SPR 220-3 4um looked bad Message-ID: clarification of above problem. realized I didn't mention which one. From jcdoll at snf.stanford.edu Sun Mar 6 17:47:18 2011 From: jcdoll at snf.stanford.edu (jcdoll at snf.stanford.edu) Date: Sun, 6 Mar 2011 17:47:18 -0800 Subject: Problem svgcoat SNF 2011-03-06 17:47:15: 220-7: uncoated spot in wafer center Message-ID: the 220-7 flow cuts off before the arm gets to the center of the wafer, which often leads to a circle in the center with absolute no photoresist. what happened to the old recipe? this is a major issue for through wafer DRIE etching. From vilanova at snf.stanford.edu Mon Mar 7 14:07:51 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 7 Mar 2011 14:07:51 -0800 Subject: Problem svgcoat SNF 2011-03-06 16:32:44: SPR 220 still looks horrible Message-ID: Adjusted Suck Back On 220-3 Recipies, tested All morning Uniformity Looks Good, Ok to use. From vilanova at snf.stanford.edu Mon Mar 7 14:08:22 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 7 Mar 2011 14:08:22 -0800 Subject: Comment svgcoat SNF 2011-03-06 17:15:07: SPR 220-3 4um looked bad Message-ID: Adjusted Suck Back On 220-3 ( 3um & 4um ) Recipies, tested All morning Uniformity Looks Good, Ok to use. From vilanova at snf.stanford.edu Mon Mar 7 14:09:00 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 7 Mar 2011 14:09:00 -0800 Subject: Problem svgcoat SNF 2011-03-06 17:47:15: 220-7: uncoated spot in wafer center Message-ID: Adjusted Dispemse Cycle, Ran Dummys, Dispense Looks Normal , Ok to use. From fatihs at snf.stanford.edu Tue Mar 8 11:42:53 2011 From: fatihs at snf.stanford.edu (fatihs at snf.stanford.edu) Date: Tue, 8 Mar 2011 11:42:53 -0800 Subject: Problem svgcoat SNF 2011-03-08 11:42:53: Wafers don't move to bake Message-ID: I tried program #2. Resist coat and spin works fine but the wafer does not move to the bake station. From vilanova at snf.stanford.edu Tue Mar 8 14:43:19 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 8 Mar 2011 14:43:19 -0800 Subject: Problem svgcoat SNF 2011-03-08 11:42:53: Wafers don't move to bake Message-ID: Adjusted Hotplate Air cylinder valve, tested, Ready to use. From ashutosh at snf.stanford.edu Thu Mar 17 18:50:14 2011 From: ashutosh at snf.stanford.edu (ashutosh at snf.stanford.edu) Date: Thu, 17 Mar 2011 18:50:14 -0700 Subject: Problem svgcoat SNF 2011-03-17 18:50:12: broken wafer, removed pieces Message-ID: From vilanova at snf.stanford.edu Fri Mar 25 08:32:53 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 25 Mar 2011 08:32:53 -0700 Subject: Problem svgcoat SNF 2011-03-17 18:50:12: broken wafer, removed pieces Message-ID: cleaned catch cup purged lines, cleaned hptplates and belts, cool plates, Cleaned Secondary Contaiment and Replaced Foil, Cycled wafers, Ok to use.