Problem svgcoat SNF 2011-03-01 19:29:49: Hot plate

dton at snf.stanford.edu dton at snf.stanford.edu
Tue Mar 1 19:29:50 PST 2011


The hot plate had problem when I ran.   The metal bar beneath the
orange belt moved and block the wafer handling unit from moving down properly.  
Someone helped me to push it back in place ... but i think the screws holding it should be tighten.
thanks,
dinh ton




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