Problem svgcoat SNF 2011-03-06 17:47:15: 220-7: uncoated spot in wafer center

jcdoll at jcdoll at
Sun Mar 6 17:47:18 PST 2011

the 220-7 flow cuts off before the arm gets to the center of the wafer, which often leads to a circle in the center with absolute no photoresist. what happened to the old recipe? this is a major issue for through wafer DRIE etching.

More information about the svgcoat-pcs mailing list