Problem svgcoat SNF 2011-03-06 17:47:15: 220-7: uncoated spot in wafer center

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Mar 7 14:09:00 PST 2011


Adjusted Dispemse Cycle, Ran Dummys, Dispense Looks Normal , 
Ok to use. 




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