From mahnaz at snf.stanford.edu Mon May 2 11:54:49 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 2 May 2011 11:54:49 -0700 Subject: Problem svgcoat SNF 2011-05-02 11:54:49: 3612 1.6 um not uniform Message-ID: ran 4 dummies and all my 4 real wafers cme out with speed boat on one side of wafers. From vilanova at snf.stanford.edu Mon May 2 14:45:34 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 2 May 2011 14:45:34 -0700 Subject: Problem svgcoat SNF 2011-05-02 11:54:49: 3612 1.6 um not uniform Message-ID: Checked bottle , checked Line for bubbles, purged line and cycled wafers , Uniformity Looks Good Back of wafers Clean, ok to use. From mahnaz at snf.stanford.edu Tue May 3 08:48:09 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 3 May 2011 08:48:09 -0700 Subject: Problem svgcoat SNF 2011-02-16 11:06:51: 220-7 no good Message-ID: We have done extensive work on the system. Worked on the pump and adjusted the stroke. Played with different scenario on the arm program. totally cleaned the exhaust line and much more. For the last few weeks we pretty much have checked the program every day for any sign of drift and so far so good. we measured the thickness and coral has been updated with that. The rules are still the same, Run at least 3 to 4 dummies and clean the tip of the nozzle on the first two wafers and then commit your wafers. Report problems on coral and my thanks to Gary and Mario. From vilanova at snf.stanford.edu Tue May 3 08:48:27 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 3 May 2011 08:48:27 -0700 Subject: Comment svgcoat SNF 2011-05-03 08:48:26: Found a lot of resist On Post bake plate Message-ID: Found a lot of resist residues On hotplate resist with chuck marks on it, CLeaned it and tested , Ok to use. From vilanova at snf.stanford.edu Tue May 3 08:53:13 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 3 May 2011 08:53:13 -0700 Subject: Problem svgcoat SNF 2011-01-19 11:34:45: 220-7 is not that uniform Message-ID: We have Been testing The Uniformity 220-7 and all of the recipes are nice and uniform , Please Clean the nozzle before start and clean the hotplate If you Use the recipes with No EBR , here are the thickness results for 7um : 74217 ( Center ) 74559 ( Top ) 74603 ( Bottom ) 74553 ( Left ) 74513 ( Right ) From vilanova at snf.stanford.edu Tue May 3 08:53:27 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 3 May 2011 08:53:27 -0700 Subject: Comment svgcoat SNF 2010-10-08 13:13:40: 220-7 Uniformity Message-ID: We have Been testing The Uniformity 220-7 and all of the recipes are nice and uniform , Please Clean the nozzle before start and clean the hotplate If you Use the recipes with No EBR , here are the thickness results for 7um : 74217 ( Center ) 74559 ( Top ) 74603 ( Bottom ) 74553 ( Left ) 74513 ( Right ) From vilanova at snf.stanford.edu Tue May 3 08:53:37 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 3 May 2011 08:53:37 -0700 Subject: Problem svgcoat SNF 2010-10-15 10:55:40: 7um no good Message-ID: We have Been testing The Uniformity 220-7 and all of the recipes are nice and uniform , Please Clean the nozzle before start and clean the hotplate If you Use the recipes with No EBR , here are the thickness results for 7um : 74217 ( Center ) 74559 ( Top ) 74603 ( Bottom ) 74553 ( Left ) 74513 ( Right ) From vilanova at snf.stanford.edu Tue May 3 08:53:56 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 3 May 2011 08:53:56 -0700 Subject: Comment svgcoat SNF 2011-01-28 19:44:08: Message-ID: We have Been testing The Uniformity 220-7 and all of the recipes are nice and uniform , Please Clean the nozzle before start and clean the hotplate If you Use the recipes with No EBR , here are the thickness results for 7um : 74217 ( Center ) 74559 ( Top ) 74603 ( Bottom ) 74553 ( Left ) 74513 ( Right ) From vilanova at snf.stanford.edu Tue May 3 08:54:21 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 3 May 2011 08:54:21 -0700 Subject: Problem svgcoat SNF 2011-02-06 17:03:22: similar problem, both tracks Message-ID: We have Been testing The Uniformity 220-7 and all of the recipes are nice and uniform , Please Clean the nozzle before start and clean the hotplate If you Use the recipes with No EBR , here are the thickness results for 7um : 74217 ( Center ) 74559 ( Top ) 74603 ( Bottom ) 74553 ( Left ) 74513 ( Right ) From gsosa at snf.stanford.edu Mon May 16 13:34:12 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 16 May 2011 13:34:12 -0700 Subject: Shutdown svgcoat SNF 2011-05-16 13:34:12: checking out exhaust system Message-ID: From vilanova at snf.stanford.edu Mon May 16 14:13:06 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 16 May 2011 14:13:06 -0700 Subject: Shutdown svgcoat SNF 2011-05-16 13:34:12: checking out exhaust system Message-ID: cleared ( Exhaust Fan Belt has been replaced From gsosa at snf.stanford.edu Wed May 18 08:51:13 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 18 May 2011 08:51:13 -0700 Subject: Comment svgcoat SNF 2011-05-18 08:51:12: Drain full Message-ID: The utility panel indicated that the drain was full. The audible alarm was turned off instead of pumping the waste out. If you need aa refresher on how to pump the waste out or what the alarms mean, please come see one of the litho staff members. Thanks From mahnaz at snf.stanford.edu Wed May 18 10:12:46 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 18 May 2011 10:12:46 -0700 Subject: Comment svgcoat SNF 2011-05-18 10:12:45: cleaned all dummies Message-ID: From lilihsu at snf.stanford.edu Tue May 24 17:34:45 2011 From: lilihsu at snf.stanford.edu (lilihsu at snf.stanford.edu) Date: Tue, 24 May 2011 17:34:45 -0700 Subject: Comment svgcoat SNF 2011-05-24 17:34:44: Thickness and uniformity test Message-ID: I didn't do yes oven or any sort of pre-bake. 1um 3612: average=10071, std dev=14 1.6um 3612: avg=16704, std dev=11 7um SPR 220-7: avg=72456, std dev=45 3um SPR 220-3: avg=28839, std dev=43 For the SPR resists I cleaned the dispense nozzle in acetone, then ran some more dummies to get rid of the acetone in the tube before running a good wafer. the 3612, I simply ran 4 dummies before the good wafer. From vilanova at snf.stanford.edu Fri May 27 08:58:56 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 27 May 2011 08:58:56 -0700 Subject: Comment svgcoat SNF 2011-05-27 08:58:55: Cleaned ...... Message-ID: Cleaned Hotplate ( Found a lot of thick resist On it, Cleaned All Dummy wafers and Both catch cups ( track 1 and 2) Cleaned Belts , Also cleaned all the Developer Dummy wafers