Problem svgcoat SNF 2011-05-02 11:54:49: 3612 1.6 um not uniform

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Mon May 2 11:54:49 PDT 2011

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ran 4 dummies and all my 4 real wafers cme out with speed boat on one side of wafers.

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