Comment svgcoat SNF 2011-05-24 17:34:44: Thickness and uniformity test

lilihsu at snf.stanford.edu lilihsu at snf.stanford.edu
Tue May 24 17:34:45 PDT 2011


I didn't do yes oven or any sort of pre-bake.
1um 3612: average=10071, std dev=14
1.6um 3612: avg=16704, std dev=11
7um SPR 220-7: avg=72456, std dev=45
3um SPR 220-3: avg=28839, std dev=43
For the SPR resists I cleaned the dispense nozzle in acetone, then ran some more dummies to get rid of the acetone in the tube before running a good wafer.  the 3612, I simply ran 4 dummies before the good wafer.




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