From dton at snf.stanford.edu Wed Nov 2 17:27:23 2011 From: dton at snf.stanford.edu (dton at snf.stanford.edu) Date: Wed, 2 Nov 2011 17:27:23 -0700 Subject: Problem svgcoat SNF 2011-11-02 17:27:22: resist is not dispensing Message-ID: Can't get any of thick resist to spin Dinh From dongrip at snf.stanford.edu Thu Nov 3 05:18:52 2011 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Thu, 3 Nov 2011 05:18:52 -0700 Subject: Problem svgcoat SNF 2011-11-03 05:18:51: resist is still not dispensing. Message-ID: From vilanova at snf.stanford.edu Thu Nov 3 08:13:38 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 3 Nov 2011 08:13:38 -0700 Subject: Problem svgcoat SNF 2011-11-02 17:27:22: resist is not dispensing Message-ID: Found the yellow cabinet Open and 2 Resist bottles sitting On the floor, Checked And Initialized the Pump Controller and Cycled Wafers, System Ok to use , resist Dispensing Properly, Uniformity Looks Good, Ok to use. PLEASE DO NOT TOUCH ANYTHING IF SOMETHING IS NOT WORKING PROPERLY JUST REPORT IT ON CORAL AND WE'LL FIX IT AS SOON AS WE CAN. From vilanova at snf.stanford.edu Thu Nov 3 08:14:03 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 3 Nov 2011 08:14:03 -0700 Subject: Problem svgcoat SNF 2011-11-03 05:18:51: resist is still not dispensing. Message-ID: PLEASE READ PREVIOUS CLEARED PROBLEM REPORT. From ywidjaja at snf.stanford.edu Sat Nov 5 04:40:24 2011 From: ywidjaja at snf.stanford.edu (ywidjaja at snf.stanford.edu) Date: Sat, 5 Nov 2011 04:40:24 -0700 Subject: Problem svgcoat SNF 2011-11-05 04:40:24: mouse Message-ID: Found the mouse on the floor and the trackball was loose. From vilanova at snf.stanford.edu Mon Nov 7 07:38:12 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 7 Nov 2011 07:38:12 -0800 Subject: Problem svgcoat SNF 2011-11-05 04:40:24: mouse Message-ID: trackball and mouse working fine, Ok to use. From dton at snf.stanford.edu Tue Nov 8 16:12:10 2011 From: dton at snf.stanford.edu (dton at snf.stanford.edu) Date: Tue, 8 Nov 2011 16:12:10 -0800 Subject: Problem svgcoat SNF 2011-11-08 16:12:10: SPR-220-7 issue Message-ID: not coming out. Dinh From barlian at snf.stanford.edu Tue Nov 8 18:12:40 2011 From: barlian at snf.stanford.edu (barlian at snf.stanford.edu) Date: Tue, 8 Nov 2011 18:12:40 -0800 Subject: Problem svgcoat SNF 2011-11-08 18:12:39: confirmed dton above Message-ID: From dongrip at snf.stanford.edu Tue Nov 8 22:16:30 2011 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Tue, 8 Nov 2011 22:16:30 -0800 Subject: Problem svgcoat SNF 2011-11-08 22:16:29: no resist dispense Message-ID: Even though i attempted to reboot the system several times, it doesn't work. I observed same problems as the previous users. I encounted the exactly same problem more than three times in a couple of weeks. Can you please address this issue or let us know how to handle this? From vilanova at snf.stanford.edu Wed Nov 9 08:40:33 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 9 Nov 2011 08:40:33 -0800 Subject: Problem svgcoat SNF 2011-11-08 16:12:10: SPR-220-7 issue Message-ID: Re initialized Pump Controller, Possible Controller failure, We'll Keep an Eye on it Tested , System dispensing resist Ok to use. From vilanova at snf.stanford.edu Wed Nov 9 08:40:39 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 9 Nov 2011 08:40:39 -0800 Subject: Problem svgcoat SNF 2011-11-08 18:12:39: confirmed dton above Message-ID: Re initialized Pump Controller, Possible Controller failure, We'll Keep an Eye on it Tested , System dispensing resist Ok to use. From vilanova at snf.stanford.edu Wed Nov 9 08:40:47 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 9 Nov 2011 08:40:47 -0800 Subject: Problem svgcoat SNF 2011-11-08 22:16:29: no resist dispense Message-ID: Re initialized Pump Controller, Possible Controller failure, We'll Keep an Eye on it Tested , System dispensing resist Ok to use. From vilanova at snf.stanford.edu Wed Nov 9 14:32:46 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 9 Nov 2011 14:32:46 -0800 Subject: Comment svgcoat SNF 2011-11-09 14:32:45: 7.0 Um Thickness Measurement test Message-ID: System Dispensing Properly , Uniformity Looks Good and here are the thick ness Measurements : Top 78072 Bottom 78851 Right 78952 Left 78776 Center 78078 From dwnam at snf.stanford.edu Mon Nov 28 01:27:08 2011 From: dwnam at snf.stanford.edu (dwnam at snf.stanford.edu) Date: Mon, 28 Nov 2011 01:27:08 -0800 Subject: Comment svgcoat SNF 2011-11-28 01:27:07: Wafer get stuck at the hot plate oven Message-ID: After the PR coating, the track for the oven does not move so wafer keeps geting stuck before the oven. From vilanova at snf.stanford.edu Mon Nov 28 09:43:25 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 28 Nov 2011 09:43:25 -0800 Subject: Comment svgcoat SNF 2011-11-28 09:43:24: Found A broken Belt During daily rounds Message-ID: Found A Broken Belts On the post bake hotplate , Replaced it and tested ok to use. From vilanova at snf.stanford.edu Mon Nov 28 09:44:02 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 28 Nov 2011 09:44:02 -0800 Subject: Comment svgcoat SNF 2011-11-28 01:27:07: Wafer get stuck at the hot plate oven Message-ID: Found Broken Belt During Daily rounds, Replaced it and tested ok to use. From gsosa at snf.stanford.edu Tue Nov 29 07:04:07 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:04:07 -0800 Subject: Comment svgcoat SNF 2010-08-13 08:44:47: Refilled all Resist bottles and purged Lines Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:04:12 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:04:12 -0800 Subject: Comment svgcoat SNF 2010-08-25 08:57:28: 7.0 micron resist Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:04:19 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:04:19 -0800 Subject: Comment svgcoat SNF 2010-09-03 10:55:14: ran 3612 1 um perfect Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:04:34 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:04:34 -0800 Subject: Comment svgcoat SNF 2011-01-11 15:34:53: Important Notice 1/11 Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:04:38 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:04:38 -0800 Subject: Comment svgcoat SNF 2011-01-12 15:16:25: 220-3 3.0um released Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:04:43 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:04:43 -0800 Subject: Comment svgcoat SNF 2011-01-13 15:43:11: 220-3 4.0um released Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:04:47 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:04:47 -0800 Subject: Comment svgcoat SNF 2011-01-13 15:49:37: 220-7 Update 1/13 Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:04:52 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:04:52 -0800 Subject: Comment svgcoat SNF 2011-02-16 08:00:34: FOUND It Powered Off Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:04:56 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:04:56 -0800 Subject: Comment svgcoat SNF 2011-03-02 10:15:30: Track Status 3/2 Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:05:01 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:05:01 -0800 Subject: Comment svgcoat SNF 2011-04-14 11:16:53: 220-7 quick up date Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:05:05 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:05:05 -0800 Subject: Comment svgcoat SNF 2011-04-21 14:03:52: Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:05:09 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:05:09 -0800 Subject: Comment svgcoat SNF 2011-04-26 17:36:02: Thickness/uniformity Check Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:05:15 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:05:15 -0800 Subject: Comment svgcoat SNF 2011-05-03 08:48:26: Found a lot of resist On Post bake plate Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:05:19 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:05:19 -0800 Subject: Comment svgcoat SNF 2011-05-18 08:51:12: Drain full Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:05:24 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:05:24 -0800 Subject: Comment svgcoat SNF 2011-05-18 10:12:45: cleaned all dummies Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:05:28 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:05:28 -0800 Subject: Comment svgcoat SNF 2011-05-24 17:34:44: Thickness and uniformity test Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:05:32 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:05:32 -0800 Subject: Comment svgcoat SNF 2011-05-27 08:58:55: Cleaned ...... Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:05:36 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:05:36 -0800 Subject: Comment svgcoat SNF 2011-06-10 09:48:47: cleaned!!! Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:05:40 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:05:40 -0800 Subject: Comment svgcoat SNF 2011-06-17 09:18:27: Replaced Spinner Carriage Tranfers Belts Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:05:45 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:05:45 -0800 Subject: Comment svgcoat SNF 2011-06-27 11:09:12: Mario started to work on tha trac already. Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:05:52 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:05:52 -0800 Subject: Comment svgcoat SNF 2011-07-01 08:46:25: cleaned Catch cup belts hotplate .... Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:05:58 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:05:58 -0800 Subject: Comment svgcoat SNF 2011-07-14 08:42:38: cleaned up Dummys chuck belts hotplates chill plates Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:06:04 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:06:04 -0800 Subject: Comment svgcoat SNF 2011-07-22 14:17:42: 220-7 Uniformity and Thickness Results Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:06:07 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:06:07 -0800 Subject: Comment svgcoat SNF 2011-08-03 08:41:06: cleaned Catch cup Belts hotplate Dummy wafers Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:06:13 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:06:13 -0800 Subject: Comment svgcoat SNF 2011-08-23 10:36:34: cleaned all the dummies Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:06:18 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:06:18 -0800 Subject: Comment svgcoat SNF 2011-09-08 17:02:54: 3612 1um and 1.6um Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:06:22 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:06:22 -0800 Subject: Comment svgcoat SNF 2011-09-08 17:04:46: 220-3 3um Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:06:35 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:06:35 -0800 Subject: Comment svgcoat SNF 2011-09-26 11:34:57: 3612 Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:06:41 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:06:41 -0800 Subject: Comment svgcoat SNF 2011-09-27 10:51:33: tested 220-3, 220-7 Message-ID: To Archives