From vilanova at snf.stanford.edu Mon Oct 3 08:56:44 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 3 Oct 2011 08:56:44 -0700 Subject: Comment svgcoat SNF 2011-09-27 17:34:50: kept stopping during my run Message-ID: Someones pressed the Wrong "START" Button, they Should Press "START Button" and NOT the START FULL LOT Button . From vilanova at snf.stanford.edu Thu Oct 6 08:20:51 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 6 Oct 2011 08:20:51 -0700 Subject: Comment svgcoat SNF 2011-09-26 09:50:43: Response to message in "Poor uniformity of 7 um..." Message-ID: Cleared. From jparker at snf.stanford.edu Tue Oct 11 14:16:03 2011 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Tue, 11 Oct 2011 14:16:03 -0700 Subject: Comment svgcoat SNF 2011-10-11 14:16:02: 7um looks great Message-ID: 7um came out wonderful---no comets, starburst, splashback, etc. at all and quite uniform. From jsnapp at snf.stanford.edu Fri Oct 14 13:16:42 2011 From: jsnapp at snf.stanford.edu (jsnapp at snf.stanford.edu) Date: Fri, 14 Oct 2011 13:16:42 -0700 Subject: Comment svgcoat SNF 2011-10-14 13:16:42: Debris on back of wafers Message-ID: Track left debris on the back of my wafers! From vilanova at snf.stanford.edu Mon Oct 17 09:29:12 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 17 Oct 2011 09:29:12 -0700 Subject: Comment svgcoat SNF 2011-10-17 09:29:12: cleaned up dummy wafers catch cup belts, hotplate and cool station Message-ID: cleaned up dummy wafers catch cup belts, hotplate and cool station, Cycled all dummies , All operations ok, Good to use. From ehe at snf.stanford.edu Wed Oct 19 14:06:27 2011 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Wed, 19 Oct 2011 14:06:27 -0700 Subject: Problem svgcoat SNF 2011-10-19 14:06:26: not sending wafers Message-ID: sender lowers but won't start sending wafers. tried cycling power. From vilanova at snf.stanford.edu Wed Oct 19 14:52:31 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 19 Oct 2011 14:52:31 -0700 Subject: Problem svgcoat SNF 2011-10-19 14:06:26: not sending wafers Message-ID: System sending wafers Fine NOw, I see User Cycling wafers Through it . From dongrip at snf.stanford.edu Wed Oct 19 23:05:38 2011 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Wed, 19 Oct 2011 23:05:38 -0700 Subject: Problem svgcoat SNF 2011-10-19 23:05:37: broken wafer pieces in the spinner Message-ID: found broken wafer pieces in the spinner. One of the previous users didn't remove it. From vilanova at snf.stanford.edu Thu Oct 20 08:59:23 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 20 Oct 2011 08:59:23 -0700 Subject: Problem svgcoat SNF 2011-10-19 23:05:37: broken wafer pieces in the spinner Message-ID: Removed Broken Pieces , cleaned Catch cup hotplate and belts, Cycled wafers, All Operations Ok, From vilanova at snf.stanford.edu Fri Oct 21 08:57:29 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 21 Oct 2011 08:57:29 -0700 Subject: Comment svgcoat SNF 2011-10-14 13:16:42: Debris on back of wafers Message-ID: cleaned Dummy wafers and tested back side EBR, All My wafers Came out clean , Please Check back of the wafers specially if you Are planing to you ASML. From hongyuc at snf.stanford.edu Sun Oct 23 16:31:13 2011 From: hongyuc at snf.stanford.edu (hongyuc at snf.stanford.edu) Date: Sun, 23 Oct 2011 16:31:13 -0700 Subject: Problem svgcoat SNF 2011-10-23 16:31:13: the hot plate is very dirty (EOM) Message-ID: From vilanova at snf.stanford.edu Mon Oct 24 07:35:12 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 24 Oct 2011 07:35:12 -0700 Subject: Problem svgcoat SNF 2011-10-23 16:31:13: the hot plate is very dirty (EOM) Message-ID: Cleaned Resist From Hotplate, tested, Ok to use.