Comment svgcoat SNF 2011-10-14 13:16:42: Debris on back of wafers

vilanova at vilanova at
Fri Oct 21 08:57:29 PDT 2011

cleaned Dummy wafers and tested back side EBR, All My wafers Came out clean ,  Please Check back of the wafers specially if you  Are 
planing to you ASML. 

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