From gsosa at snf.stanford.edu Wed Sep 7 07:12:32 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 7 Sep 2011 07:12:32 -0700 Subject: Shutdown svgcoat SNF 2011-09-07 07:12:31: Scheduled Shutdown Message-ID: System Shutdown. Solvent exhaust upgrade in progress. From mahnaz at snf.stanford.edu Thu Sep 8 16:29:19 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 8 Sep 2011 16:29:19 -0700 Subject: Shutdown svgcoat SNF 2011-09-07 07:12:31: Scheduled Shutdown Message-ID: ran wafers for 3612 and 220-3 resist . uli is entering the data in to coral . 220-7 needs to be tested tomorrow litho team From uli at snf.stanford.edu Thu Sep 8 17:02:55 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Thu, 8 Sep 2011 17:02:55 -0700 Subject: Comment svgcoat SNF 2011-09-08 17:02:54: 3612 1um and 1.6um Message-ID: 3612 1um top 10273A center10248A bottom 10269A left 10278A right 10276A 3612 1.6um top 16949A center 17016A bottom 16958A left16962A right 16962A From uli at snf.stanford.edu Thu Sep 8 17:04:47 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Thu, 8 Sep 2011 17:04:47 -0700 Subject: Comment svgcoat SNF 2011-09-08 17:04:46: 220-3 3um Message-ID: top 29575 center 29582A bottom 29556A left 29557A right 29642A From nharjee at snf.stanford.edu Sun Sep 25 17:49:04 2011 From: nharjee at snf.stanford.edu (nharjee at snf.stanford.edu) Date: Sun, 25 Sep 2011 17:49:04 -0700 Subject: Problem svgcoat SNF 2011-09-25 17:49:04: Poor uniformity of 7 um SPR220-7 Message-ID: Cleaned the nozzle several times and ran many dummies, but could not get consistent films. During dispense, it appears that bubbles are being trapped in the resist which leads to film roughness and starburst patterns. From vilanova at snf.stanford.edu Mon Sep 26 08:43:38 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 26 Sep 2011 08:43:38 -0700 Subject: Problem svgcoat SNF 2011-09-25 17:49:04: Poor uniformity of 7 um SPR220-7 Message-ID: Found all the dummy wafers Full of thick resist residues , cleaned them up, and cleaned nozzle, Cleaned up catch cup,. and run + Cycled Thick Resists Programs , All of m ywafers Came out Fine, Uniformity Looks Fine, All Operations Are ok, Ready to use. IF USERS KEEP RUNNING THE SAME DIRTY WAFERS OVER AND OVER AGAIN THE UNIFORMITY RESULT ( ON THE DUMMY WAFERS) WILL LOOK AWFUL. . From nharjee at snf.stanford.edu Mon Sep 26 09:50:44 2011 From: nharjee at snf.stanford.edu (nharjee at snf.stanford.edu) Date: Mon, 26 Sep 2011 09:50:44 -0700 Subject: Comment svgcoat SNF 2011-09-26 09:50:43: Response to message in "Poor uniformity of 7 um..." Message-ID: I used only 2 dummy wafers which I cycled repeatedly and cleaned with acetone in between each run to remove all previous resist. Uniformity of 7 um SPR220-7 was still poor. From mahnaz at snf.stanford.edu Mon Sep 26 11:34:57 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 26 Sep 2011 11:34:57 -0700 Subject: Comment svgcoat SNF 2011-09-26 11:34:57: 3612 Message-ID: thickness check 10232, 10219, 10243, 10247, 10244 looks very good. From mahnaz at snf.stanford.edu Mon Sep 26 11:59:23 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 26 Sep 2011 11:59:23 -0700 Subject: Problem svgcoat SNF 2011-09-26 11:59:23: 220-3 suck back needs help Message-ID: there is no suck back. thickness is good 29765, 29724, 29728,29813,29770 From mahnaz at snf.stanford.edu Mon Sep 26 12:06:45 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 26 Sep 2011 12:06:45 -0700 Subject: Problem svgcoat SNF 2011-09-26 12:06:44: 220-7 7 um Message-ID: no suck back after the dispense the resist pulles over the wafer. will measure the wafers after lunch. the uniformity still good. From vilanova at snf.stanford.edu Tue Sep 27 09:05:39 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 27 Sep 2011 09:05:39 -0700 Subject: Problem svgcoat SNF 2011-09-26 11:59:23: 220-3 suck back needs help Message-ID: Adjusted SUck back and tested, Ok to use. From vilanova at snf.stanford.edu Tue Sep 27 09:05:54 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 27 Sep 2011 09:05:54 -0700 Subject: Problem svgcoat SNF 2011-09-26 12:06:44: 220-7 7 um Message-ID: Adjusted Suck back and tested, Ok to use. From mahnaz at snf.stanford.edu Tue Sep 27 10:51:34 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 27 Sep 2011 10:51:34 -0700 Subject: Comment svgcoat SNF 2011-09-27 10:51:33: tested 220-3, 220-7 Message-ID: looks very good and uniform thickness within spec. Thanks Mario and Gary. From wslee at snf.stanford.edu Tue Sep 27 17:34:51 2011 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Tue, 27 Sep 2011 17:34:51 -0700 Subject: Comment svgcoat SNF 2011-09-27 17:34:50: kept stopping during my run Message-ID: I was running 10 wafers and the coat track kept stopping after every other wafer. I was able to press start each time and get my wafers through.