Problem svgcoat SNF 2011-09-25 17:49:04: Poor uniformity of 7 um SPR220-7

nharjee at snf.stanford.edu nharjee at snf.stanford.edu
Sun Sep 25 17:49:04 PDT 2011


Cleaned the nozzle several times and ran many dummies, but could not get consistent films. During dispense, it appears that bubbles are being trapped in the resist which leads to film roughness and starburst patterns.




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