Problem svgcoat SNF 2011-09-25 17:49:04: Poor uniformity of 7 um SPR220-7

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Sep 26 08:43:38 PDT 2011


Found all the dummy wafers Full of thick resist residues , cleaned them up, and cleaned nozzle, Cleaned up catch cup,. and run + Cycled 
Thick Resists Programs , All of m ywafers Came out Fine, Uniformity
 Looks Fine, All Operations Are ok, Ready to use. 
IF USERS KEEP RUNNING THE SAME DIRTY WAFERS OVER AND 
OVER AGAIN THE UNIFORMITY RESULT ( ON THE DUMMY WAFERS)
WILL LOOK AWFUL. . 




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