From gsosa at snf.stanford.edu Tue Feb 14 15:58:14 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 14 Feb 2012 15:58:14 -0800 Subject: Shutdown svgcoat SNF 2012-02-14 15:58:13: Update 2/14 Message-ID: System re-installed after renovation shutdown. Flushed dispense lines and purged in resist and EBR. All hardware functions OK. Problem with new hardware upgrades executing properly through the nettrack plateform. Bugs to be resolved by AZN and NetTrack. From gsosa at snf.stanford.edu Tue Feb 28 16:30:06 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 28 Feb 2012 16:30:06 -0800 Subject: Shutdown svgcoat SNF 2012-02-14 15:58:13: Update 2/14 Message-ID: Releasing track for 3612 1.0 and 1.6 micron process and 220-3 3.0 and 4.0 micron process. Still need to work on 220-7 micron process and vapor prime process. Thickness Tests 3612 1.0 micron- mean 10393 A, std dev: 20 A 3612 1.6 micron - mean 17292 A, std dev 38 A 220-3 3.0 Micron- mean 30086 A, std dev. 49 A From gsosa at snf.stanford.edu Tue Feb 28 16:30:11 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 28 Feb 2012 16:30:11 -0800 Subject: Shutdown svgcoat SNF 2011-12-13 13:01:03: Shutdown for Renovation Message-ID: Releasing track for 3612 1.0 and 1.6 micron process and 220-3 3.0 and 4.0 micron process. Still need to work on 220-7 micron process and vapor prime process. Thickness Tests 3612 1.0 micron- mean 10393 A, std dev: 20 A 3612 1.6 micron - mean 17292 A, std dev 38 A 220-3 3.0 Micron- mean 30086 A, std dev. 49 A From gsosa at snf.stanford.edu Tue Feb 28 16:30:31 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 28 Feb 2012 16:30:31 -0800 Subject: Problem svgcoat SNF 2012-02-28 16:30:30: Update 2/28 Message-ID: Releasing track for 3612 1.0 and 1.6 micron process and 220-3 3.0 and 4.0 micron process. Still need to work on 220-7 micron process and vapor prime process. Thickness Tests 3612 1.0 micron- mean 10393 A, std dev: 20 A 3612 1.6 micron - mean 17292 A, std dev 38 A 220-3 3.0 Micron- mean 30086 A, std dev. 49 A