From gsosa at snf.stanford.edu Tue Jul 10 16:04:38 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 10 Jul 2012 16:04:38 -0700 Subject: Problem svgcoat SNF 2012-07-10 16:04:38: 3612 Dripping Message-ID: From gsosa at snf.stanford.edu Tue Jul 10 16:37:04 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 10 Jul 2012 16:37:04 -0700 Subject: Problem svgcoat SNF 2012-07-10 16:04:38: 3612 Dripping Message-ID: Checked and adjusted pump stroke speed and suckback. From raneeyoo at snf.stanford.edu Wed Jul 11 01:21:59 2012 From: raneeyoo at snf.stanford.edu (raneeyoo at snf.stanford.edu) Date: Wed, 11 Jul 2012 01:21:59 -0700 Subject: Comment svgcoat SNF 2012-07-11 01:21:58: utility alarm ran Message-ID: when the utility alarm ran, i pushed dekivery button. but the sender station stopped. i tried to reset the sender station, but did not work. rest of process worked. thanks From raneeyoo at snf.stanford.edu Wed Jul 11 01:24:10 2012 From: raneeyoo at snf.stanford.edu (raneeyoo at snf.stanford.edu) Date: Wed, 11 Jul 2012 01:24:10 -0700 Subject: Comment svgcoat SNF 2012-07-11 01:24:10: sender station stopped Message-ID: when the utility alarm ran, i pushed the delivery button, but the sender station stopped. i tried to reset the sender station, but no success. the rest of process worked. thanks. From raneeyoo at snf.stanford.edu Wed Jul 11 01:26:43 2012 From: raneeyoo at snf.stanford.edu (raneeyoo at snf.stanford.edu) Date: Wed, 11 Jul 2012 01:26:43 -0700 Subject: Comment svgcoat SNF 2012-07-11 01:26:42: sender station working now Message-ID: From vilanova at snf.stanford.edu Wed Jul 11 07:35:13 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 11 Jul 2012 07:35:13 -0700 Subject: Comment svgcoat SNF 2012-07-11 01:21:58: utility alarm ran Message-ID: Found The small Carboy Under Coater # 1 Full Of resist, When The Carboy get full the system Wont work at all, Just Empty The Carboy Using the Top Left Buttom On the Right hand side To empty the carboy and the system Should be back to normal, From vilanova at snf.stanford.edu Wed Jul 11 07:35:18 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 11 Jul 2012 07:35:18 -0700 Subject: Comment svgcoat SNF 2012-07-11 01:24:10: sender station stopped Message-ID: Found The small Carboy Under Coater # 1 Full Of resist, When The Carboy get full the system Wont work at all, Just Empty The Carboy Using the Top Left Buttom On the Right hand side To empty the carboy and the system Should be back to normal, From vilanova at snf.stanford.edu Wed Jul 11 07:35:26 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 11 Jul 2012 07:35:26 -0700 Subject: Comment svgcoat SNF 2012-07-11 01:26:42: sender station working now Message-ID: Found The small Carboy Under Coater # 1 Full Of resist, When The Carboy get full the system Wont work at all, Just Empty The Carboy Using the Top Left Buttom On the Right hand side To empty the carboy and the system Should be back to normal, From eldwin at snf.stanford.edu Wed Jul 25 11:49:25 2012 From: eldwin at snf.stanford.edu (eldwin at snf.stanford.edu) Date: Wed, 25 Jul 2012 11:49:25 -0700 Subject: Problem svgcoat SNF 2012-07-25 11:49:25: wafer stuck Message-ID: track cannot restart and one of the belts is still running From vilanova at snf.stanford.edu Wed Jul 25 13:11:11 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 25 Jul 2012 13:11:11 -0700 Subject: Problem svgcoat SNF 2012-07-25 11:49:25: wafer stuck Message-ID: Maybe Someone Removed The wafers Before it finish GOing all the way to the cassette, Re started the System and Cycled wafers, All operations are Ok, Good to use. From lofaolain at snf.stanford.edu Fri Jul 27 12:12:31 2012 From: lofaolain at snf.stanford.edu (lofaolain at snf.stanford.edu) Date: Fri, 27 Jul 2012 12:12:31 -0700 Subject: Problem svgcoat SNF 2012-07-27 12:12:31: Problems with wafer transfer Message-ID: The chill step is being skipped and the wafer is pushed out of position on the final belt, giving an error. I reset the track before leaving From vilanova at snf.stanford.edu Mon Jul 30 06:45:30 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 30 Jul 2012 06:45:30 -0700 Subject: Problem svgcoat SNF 2012-07-27 12:12:31: Problems with wafer transfer Message-ID: Cleaned Up Cooling Plate and Belts , tested Several times With Dummy wafers, Cooling Plate Working Fine. Ok to use. From xuanwu at snf.stanford.edu Tue Jul 31 00:00:57 2012 From: xuanwu at snf.stanford.edu (xuanwu at snf.stanford.edu) Date: Tue, 31 Jul 2012 00:00:57 -0700 Subject: Problem svgcoat SNF 2012-07-31 00:00:56: wafers sometimes still stuck during transport Message-ID: to the hotplate. I think the culprit is the piece of metal at the second screw on the white railing. Sometimes there's resist on there, and that added height blocks wafer progression. From vilanova at snf.stanford.edu Tue Jul 31 07:41:19 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 31 Jul 2012 07:41:19 -0700 Subject: Problem svgcoat SNF 2012-07-31 00:00:56: wafers sometimes still stuck during transport Message-ID: Removed Resist From Sensor and hotplate, Cycled wafers, All Operations Ok, Good to use.