Problem svgcoat SNF 2012-07-25 11:49:25: wafer stuck

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Wed Jul 25 13:11:11 PDT 2012


Maybe Someone Removed The wafers Before it finish GOing all the 
way to the cassette, Re started the System and  Cycled wafers,
All operations are Ok,  Good to use.




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