Problem svgcoat SNF 2012-07-27 12:12:31: Problems with wafer transfer

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Jul 30 06:45:30 PDT 2012


Cleaned Up Cooling Plate and Belts , tested Several times With 
Dummy wafers, Cooling Plate Working Fine.
Ok to use. 




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