From cbellew at snf.stanford.edu Thu Jun 7 16:53:32 2012 From: cbellew at snf.stanford.edu (cbellew at snf.stanford.edu) Date: Thu, 7 Jun 2012 16:53:32 -0700 Subject: Problem svgcoat SNF 2012-06-07 16:53:31: 220-3 dispense line dripping Message-ID: A drip is forming on the 220-3 dispense nozzle that regularly drips onto the wafer during the EBR step. Maybe more suckback is required. From gsosa at snf.stanford.edu Fri Jun 8 15:35:42 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 8 Jun 2012 15:35:42 -0700 Subject: Problem svgcoat SNF 2012-06-07 16:53:31: 220-3 dispense line dripping Message-ID: Checked and adjusted suckback on 220-3 resist pump. Tested with dummy wafers. Looks OK now. From bchui at snf.stanford.edu Wed Jun 13 22:32:47 2012 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Wed, 13 Jun 2012 22:32:47 -0700 Subject: Problem svgcoat SNF 2012-06-13 22:32:46: dispense arm out of alignment Message-ID: One of my wafers broke while on the coater chuck. After that, the machine continued to be able to coat wafers, but the dispense arm didn't fully return to its home position after dispense unless you gave it a tiny nudge downwards (otherwise it starts to alarm saying "is dispenser at bottom?" and the spin timer doesn't start counting.) I suspect one of the debris pieces must have hit the dispense arm and knocked it out of whack when the wafer broke. From gsosa at snf.stanford.edu Thu Jun 14 08:58:52 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 14 Jun 2012 08:58:52 -0700 Subject: Shutdown svgcoat SNF 2012-06-14 08:58:52: Shutdown Message-ID: From gsosa at snf.stanford.edu Thu Jun 14 13:58:37 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 14 Jun 2012 13:58:37 -0700 Subject: Problem svgcoat SNF 2012-06-13 22:32:46: dispense arm out of alignment Message-ID: Failing "dispense arm down" at home position only. Checked and found dispense arm drive belt misaligned at home position causing the arm to bind up when moving home. Adjusted pully so that belt is centered throuout its full travel. Checked and adjusted up/down pneumatics for smooth operation. Checked and adjusted wafer centering. Tested with standard program. All working normal. From gsosa at snf.stanford.edu Thu Jun 14 13:58:43 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 14 Jun 2012 13:58:43 -0700 Subject: Shutdown svgcoat SNF 2012-06-14 08:58:52: Shutdown Message-ID: Failing "dispense arm down" at home position only. Checked and found dispense arm drive belt misaligned at home position causing the arm to bind up when moving home. Adjusted pully so that belt is centered throuout its full travel. Checked and adjusted up/down pneumatics for smooth operation. Checked and adjusted wafer centering. Tested with standard program. All working normal.