From gsosa at snf.stanford.edu Mon Mar 5 15:04:46 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 5 Mar 2012 15:04:46 -0800 Subject: Problem svgcoat SNF 2012-02-28 16:30:30: Update 2/28 Message-ID: 220-7 resist process released. Note: with the new pivotting dispense arm, it is difficult to clean the nozzle when it is in the home position. this problem is resolved in step #1 of the process program. During the 5k spin in step #1, the nozzle is moved to a position just outside the process area and holds there for 8 seconds. Durning this time, you can easily access the nozzle for cleaning with a green swab. Please ask a litho staff member if you need assistance or a demonstration. 220-7 7.0 micron thickness: Mean- 74555 A, Std Dev 47 A From gsosa at snf.stanford.edu Mon Mar 5 15:05:08 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 5 Mar 2012 15:05:08 -0800 Subject: Comment svgcoat SNF 2012-03-05 15:05:08: Update 3/5 Message-ID: 220-7 resist process released. Note: with the new pivotting dispense arm, it is difficult to clean the nozzle when it is in the home position. this problem is resolved in step #1 of the process program. During the 5k spin in step #1, the nozzle is moved to a position just outside the process area and holds there for 8 seconds. Durning this time, you can easily access the nozzle for cleaning with a green swab. Please ask a litho staff member if you need assistance or a demonstration. 220-7 7.0 micron thickness: Mean- 74555 A, Std Dev 47 A From zzp at snf.stanford.edu Sun Mar 11 18:16:27 2012 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Sun, 11 Mar 2012 18:16:27 -0700 Subject: Problem svgcoat SNF 2012-03-11 18:16:27: program 7 EBR Message-ID: program says 2mm but turns out to be ~4mm. From vilanova at snf.stanford.edu Mon Mar 12 07:49:40 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 12 Mar 2012 07:49:40 -0700 Subject: Problem svgcoat SNF 2012-03-11 18:16:27: program 7 EBR Message-ID: Ran Program #7 Several Times And Measured EBR And I got a consistent 2mm EBR On each Wafer , From jsegal at snf.stanford.edu Thu Mar 15 11:45:07 2012 From: jsegal at snf.stanford.edu (jsegal at snf.stanford.edu) Date: Thu, 15 Mar 2012 11:45:07 -0700 Subject: Problem svgcoat SNF 2012-03-15 11:45:07: sender station stuck down Message-ID: Sender station got stuck halfway through batch of wafers, took out cassette but cannot get platform back up From nxs4059 at snf.stanford.edu Thu Mar 15 12:05:52 2012 From: nxs4059 at snf.stanford.edu (nxs4059 at snf.stanford.edu) Date: Thu, 15 Mar 2012 12:05:52 -0700 Subject: Comment svgcoat SNF 2012-03-15 12:05:51: got sender station back up Message-ID: just had to put a cassette in it From vilanova at snf.stanford.edu Thu Mar 15 14:26:23 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 15 Mar 2012 14:26:23 -0700 Subject: Problem svgcoat SNF 2012-03-15 11:45:07: sender station stuck down Message-ID: Sender Casette working Fine, If the cassette doesnt Sit Properly Over the sensor the Cassette will not go all the way down. From vilanova at snf.stanford.edu Thu Mar 15 14:26:28 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 15 Mar 2012 14:26:28 -0700 Subject: Comment svgcoat SNF 2012-03-15 12:05:51: got sender station back up Message-ID: Sender Casette working Fine, If the cassette doesnt Sit Properly Over the sensor the Cassette will not go all the way down. From wslee at snf.stanford.edu Fri Mar 30 07:30:46 2012 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Fri, 30 Mar 2012 07:30:46 -0700 Subject: Problem svgcoat SNF 2012-03-30 07:30:46: 1.6um recipe Message-ID: I measured the resist thickness to be 1.8um and the EBR appeared to be larger than 2mm. From vilanova at snf.stanford.edu Fri Mar 30 08:52:32 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 30 Mar 2012 08:52:32 -0700 Subject: Problem svgcoat SNF 2012-03-30 07:30:46: 1.6um recipe Message-ID: checked and adjusted EBR, Checked thickness ( Thickness within Spec) Ok to use.