Problem svgcoat: Prime Oven Problem

storment at snf.stanford.edu storment at snf.stanford.edu
Fri Jan 11 13:11:37 PST 2013


The prime oven is breaking wafers as it's lower them to the hot plate. It seems that the arms are not closing evenly ??
Also all of the resist on my wafers that I processed last night peeled off. Most of the wafers were freshly coated with Al. Reworking again and again didn't help>??




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