Problem svgcoat: svgcoat broke my wafer

sanli at snf.stanford.edu sanli at snf.stanford.edu
Fri Jan 11 13:11:37 PST 2013


The first wafer passed through prime, but the prime could not sense the 2nd wafer, and fed the two wafers into the coater. Of course one of them broke. Of course it was the one I have been working on for weeks. 




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