Problem svgcoat: PR films are looking spotty again. . . !
sminne at snf.stanford.edu
sminne at snf.stanford.edu
Fri Jan 11 13:11:37 PST 2013
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Problem svgcoat: hmds prime having trouble getting vacuum
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Problem svgcoat: Prime station does not work, get a "CMV Vac rem wf " message. Machine is OK to use if you don't need prime, or if you want to manually prime your wafers at one of the Headway spinners.
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Problem svgcoat: hmds prime having trouble getting vacuum
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Problem svgcoat: Prime station does not work, get a "CMV Vac rem wf " message. Machine is OK to use if you don't need prime, or if you want to manually prime your wafers at one of the Headway spinners.
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