Problem svgcoat: Prime station does not work, get a "CMV Vac rem wf " message. Machine is OK to use if you don't need prime, or if you want to manually prime your wafers at one of the Headway spinners.

beckwith at snf.stanford.edu beckwith at snf.stanford.edu
Fri Jan 11 13:11:37 PST 2013





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