Problem svgcoat: Recipe:1/7/1,EBR is getting on front of wafer
caudillo at snf.stanford.edu
caudillo at snf.stanford.edu
Fri Jan 11 13:11:37 PST 2013
Previous message:
Problem svgcoat: Prime station does not work, get a "CMV Vac rem wf " message. Machine is OK to use if you don't need prime, or if you want to manually prime your wafers at one of the Headway spinners.
Next message:
Problem svgcoat: CMB-VAC error on prime station
Messages sorted by:
[ date ]
[ thread ]
[ subject ]
[ author ]
Previous message:
Problem svgcoat: Prime station does not work, get a "CMV Vac rem wf " message. Machine is OK to use if you don't need prime, or if you want to manually prime your wafers at one of the Headway spinners.
Next message:
Problem svgcoat: CMB-VAC error on prime station
Messages sorted by:
[ date ]
[ thread ]
[ subject ]
[ author ]
More information about the svgcoat-pcs mailing list