Problem svgcoat: HMDS Track is dropping wafers
mbadi at snf.stanford.edu
mbadi at snf.stanford.edu
Fri Jan 11 13:11:37 PST 2013
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This seems to be happining because the one of the tracks is bent.
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Problem svgcoat: resist on vapor prime chuck
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Problem svgcoat: spin chuck pulls down to fast breaking wafer
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