Problem svgcoat: broken wafer

rtchang at snf.stanford.edu rtchang at snf.stanford.edu
Fri Jan 11 13:11:37 PST 2013


mishandling by coater caused broken wafer -- still
inside coater.  Looked like after resist was spun, when wafer was being shuttled to hot plate, the black piece to accept
the next wafer for coating popped up too soon, and hit the outgoing wafer.




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