Problem svgcoat SNF 2012-08-10 20:30:16: 7 1um terrible

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Fri Jan 11 13:11:37 PST 2013


Cleaned Up System and Dummy wafers, Cycled Many Wafers Using 
the same Recipe Program # 7 1um , Uniformity Looks Good on 
All My wafers, Thickness test Results Are Within Specs, Couldnt
Repeat the User error, Ok to use. 



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