Problem svgcoat SNF 2012-08-23 15:28:30: wafer won't move to hot plate after coating
xzhuan1 at snf.stanford.edu
xzhuan1 at snf.stanford.edu
Fri Jan 11 13:11:37 PST 2013
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Shutdown svgcoat SNF 2012-08-17 16:02:08: The track is not responding
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Problem svgcoat SNF 2012-08-23 15:28:30: wafer won't move to hot plate after coating
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Shutdown svgcoat SNF 2012-08-17 16:02:08: The track is not responding
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Problem svgcoat SNF 2012-08-23 15:28:30: wafer won't move to hot plate after coating
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