Problem svgcoat SNF 2012-08-23 15:28:30: wafer won't move to hot plate after coating

vilanova at vilanova at
Fri Jan 11 13:11:37 PST 2013

Cleaned Catch cup , Catch cup , chuck , 
Increased Air Flow To Wafer Carriage, Cycled Several Wafers, 
aystem Working Fine, Ok to use 

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