Comment svgcoat SNF 2012-08-14 15:55:39: Error on final stage

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Fri Jan 11 13:11:37 PST 2013


Cleaned Catch cup , Catch cup , chuck , 
Increased Air Flow To Wafer Carriage, Cycled Several Wafers, 
aystem Working Fine, Ok to use 



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